Our Facilities

The NSF Center for High-rate Nanomanufacturing maintains a strong research presence at Northeastern University. Most of the scientific research is carried out in the George J. Kostas Nanoscale Technology and Manufacturing Research Center. Established through a generous gift from Mr. Kostas, the facility was completed in 2005.

The Kostas Facility has capabilities for optical lithography, nanolithography, thin film deposition, furnace processes, wet chemical processes, megasonic and ultrasonic cleaning, ICP plasma etching, ion milling, and characterization, including surface topography, thin film characterization, optical microscopy, wire bonding, and particle characterization. The imaging lab has scanning electron microcopes, and capabilities in FESEM, e-beam writing, EDX, SPM, nanomanipulators, surface profilometry, and surface energy analysis.

The Class 10, 1000, and 10000 cleanroom space is available for use by faculty, students, researchers, and external users.  Researchers and outside partners may be able to obtain access to research facilities in other Northeastern programs, such as in the Bouvé College of Health Sciences, or at other institutions affiliated with the Center, such as the University of Massachusetts-Lowell.

Kostas Research Equipment, by Lab:

CLEAN ROOM – Class 10

  • Contact Angle Measurement – Pioneer 800
  • Fluorescence MicroScope – Optiphot 200
  • Nanoimprinter – Nanonex NX2000
  • Optical Surface Profiler – Zygo NuView 6000
  • Surface Particle Analyzer – Tencor 5500

IMAGING SURFACE CHARACTERIZATION LAB

  • Atomic Force Microscope – Parks Scientific NX-10
  • Atomic Force Microscope – PSIA XE150
  • Cross Beam Microscope FIB – Carl Zeiss 1540
  • Cross Beam Microscope SEM – Carl Zeiss 1540
  • Etching System – XACTIX e1
  • Lithography – SEM Nabity Lithography System
  • Profilometer – Dektak 3030/3ST
  • Scanning Electron Microscope – PGT EDS
  • Scanning Electron Microscope – Supra 25
  • Xray Diffratometer – PANalytical/Philips X’Pert Pro

OPTICAL LITHOGRAPHY LAB

  • Mask Aligner – Quintel 4000
  • Spinner – Brewer Science
  • Spinner – Solitec SU8

PLASMA ETCH & DEPOSITION LAB

  • Plasma Etch – Anatech SP-100
  • Plasma Etch – Oxford Plasma Lab System Etch Tool
  • Plasma Etch – Unaxis ICP Etch: PlasmaTherm 790
  • Sputter – MRC 8667

THIN FILM DEPOSITION LAB

  • E-beam Evaporation System
  • Ion Mill – Veeco Microtech
  • Sputter – Perkin Elmer 2400
  • Thermal Evaporator

WET CHEMISTRY LAB

  • Dryer – Tousimis Dryer

MANUFACTURING & TESTING LABS

  • Bruce Anneal Furnace
  • Dicing Saw – Micro Automation 1006
  • Glove Box – LC Technologies
  • Probe – 4 Point Manual
  • Probe – Electrical
  • Spectrometer – Ocean Optics

NEW LAB (676 sq.ft. to open in Winter 2013-14)

  • About $1 million in lab equipment

Additional information about each piece of equipment and its use (PDF file).