Our Facilities

The NSF Center for High-rate Nanomanufacturing maintains a strong research presence at Northeastern University. Most of our scientific research is carried out at the George J. Kostas Nanoscale Technology and Manufacturing Research Center (on Northeastern’s main campus in downtown Boston) or at the George Kostas Research Institute for Homeland Security (on Northeastern’s Innovation Campus in Burlington, Mass).

The Kostas Facility in Boston has Class 10, 1000, and 10000 cleanroom space for use by faculty, students, researchers, and external users.  It has instrumentation for optical lithography, nanolithography, thin film deposition, furnace processes, wet chemical processes, megasonic and ultrasonic cleaning, ICP plasma etching, ion milling, and characterization, including surface topography, thin film characterization, optical microscopy, wire bonding, and particle characterization. The imaging lab has scanning electron microcopes, and capabilities in FESEM, e-beam writing, EDX, SPM, nanomanipulators, surface profilometry, and surface energy analysis.

The Kostas Research Institute in Burlington houses the CHN’s pilot line for nanomanufacturing research and prototyping.  It is home to NanoOPS – the Nanoscale Offset Printing System – and research lab also has instrumentation for measuring profiles as well as a SEM and other microscopy tools. Located about 20 miles to the north and west of Boston, the KRI also has meeting space for internal and outside users and office space for university-affiliated entrepreneurs.