CMC at SEMATECH Surface Preparation and Cleaning Conference

| April 23, 2014

Ahmed A. Busnaina, Ph.D., Director of the NSF Center for Micro and Nano Contamination Control (CMC) at Northeastern University, together with Northeastern University graduate students and staff from MTPV Power Corporation, will present at the 2014 SEMATECH Surface Preparation and Cleaning Conference (SPCC), held in Austin, TX on April 22-24.

The SEMATECH SPCC is an annual event which brings together prominent researchers from the semiconductor industry and the university community to focus on the current developments and ITRS challenges in advanced wafer and mask cleaning and surface preparation technologies.

The topic of the CMC presentation will be Damage-free Dry Removal of Nanoscale Particles from 3D Silicon Structures Using Laser Shockwave Cleaning.